PAIR seminar : nanoparticle technologies in microelectronics, air quality, health effects, and filtration

The seminar commenced with a warm welcome and introduction of the speaker by Prof. CHEN Qingyan, Director of PAIR. Prof. Pui began his presentation by outlining the recent advancements in nanoparticle technologies, covering instrumentation developments, ISO standards and industry partnerships. He then delved into the applications of nanoparticle technologies in four interdisciplinary areas:
Microelectronics: Contamination control in Extreme UV Lithography (EUVL) systems;
Air Quality: PM2.5 mitigation, respirators, and indoor and urban pollution controls;
Health Effects: Nanomedicine, bioaerosol sensors, UV-C decontamination; and
Filtration: Prediction of filter media performance and wildfire impacts on electret filter efficiency, and large-scale direct-capture of atmospheric CO2 to combat climate change.
In his closing remarks, Prof. Pui highlighted that nanoparticles are involved in multiple disciplines, bringing both benefits and potential harm to the environment, human health and semiconductor manufacturing. He underscored the importance of collaborative fundamental and applied research between academia and industry to foster a sustainable future, urging stronger partnerships among governments, industries and researchers to create a healthier and more prosperous society in the long run.
Event date: 13/06/2025
Speaker: Prof. David Y. H. PUI
Hosted by: PolyU Academy for Interdisciplinary Research